JPH02118858U - - Google Patents
Info
- Publication number
- JPH02118858U JPH02118858U JP2868589U JP2868589U JPH02118858U JP H02118858 U JPH02118858 U JP H02118858U JP 2868589 U JP2868589 U JP 2868589U JP 2868589 U JP2868589 U JP 2868589U JP H02118858 U JPH02118858 U JP H02118858U
- Authority
- JP
- Japan
- Prior art keywords
- load
- frequency power
- power source
- frequency
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 239000000112 cooling gas Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2868589U JPH02118858U (en]) | 1989-03-13 | 1989-03-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2868589U JPH02118858U (en]) | 1989-03-13 | 1989-03-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02118858U true JPH02118858U (en]) | 1990-09-25 |
Family
ID=31252252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2868589U Pending JPH02118858U (en]) | 1989-03-13 | 1989-03-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02118858U (en]) |
-
1989
- 1989-03-13 JP JP2868589U patent/JPH02118858U/ja active Pending
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